ULTRAPUREWATER
Ultrapure Water
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½ÇÇè¿ë Ãʼø¼ö¶õ ½ÇÇè½Ç¿¡ °ø±ÞµÇ´Â ¼öµ¾¹° ¼Ó¿¡ Á¸ÀçÇÏ´Â ÀÔÀÚ, ¹«±âÀÌ¿Â, À¯±â¹°, ¹Ì»ý¹°µî°ú °°Àº ¿À¿°¿øµéÀ»
Àüó¸®ÇÊÅÍ, ¿ª»ïÅõ¸·(RO membrane), Å»ÀÌ¿Â(DI) Ä«Æ®¸®Áö, Àڿܼ± ·¥ÇÁ(UV Lamp_»ì±Õ¿ëÆÄÀå + À¯±â¹° ±¤»êÈÆÄÀå),
ÇÑ¿Ü¿©°ú¸·(UF membrane)À» ÀûÀýÇÑ ¼ø¼´ë·Î °ÅÃÄ ¿Ïº®ÇÏ°Ô Á¦°ÅµÈ »óÅÂÀÇ ¹°À» Ãʼø¼ö(Ultrapure Water)¶ó ÇÑ´Ù.
À̶§ ÃøÁ¤µÇ´Â Ãʼø¼öÀÇ ¼öÁúÀº ¾Æ·¡ Ç¥ÀÇ ASTM(American Society for Testing and Materials)¿¡¼ ±ÔÁ¤ÇÏ´Â
Ãʼø¼ö(Type 1) ¼öÁúÀÇ ±âÁØÀÎ ÀúÇ×Ä¡(Resistivity)_18.2 §Û §¯, TOC(ÃÑÀ¯±âź¼Ò)_100ppb ¹Ì¸¸,
¹ÚÅ׸®¾Æ(Bacteria)_10cfu/ml ¿£µµÅå½Å(Endotoxin)_0.03EU/ml ¹Ì¸¸À¸·Î ÃøÁ¤ÀÌ µÇ¾îÁ®¾ß ÀûÇÕÇÏ´Ù°í ÇÒ ¼ö ÀÖ´Ù.
ASTM Specifications
Type 1 | Type 2 | Type 3 | |
---|---|---|---|
Resistivity (§Û §¯) @ 25¡É | £¾18.0 | > 1.0 | > 4.0 |
TOC (ppb) | < 100 | < 50 | < 200 |
Sodium (ppb) | < 1 | < 5 | < 10 |
Chloride (ppb) | < 1 | < 5 | < 10 |
Silica (ppb) | < 3 | < 3 | < 50 |
Silica (ppb) | < 3 | < 3 | < 50 |
Bacteria (cfu/ml)(*)) | < 10 | < 100 | < 10,000 |
Endotoxin (EU/ml)(*)) | < 0.03 | < 0.25 | NA |